A new physical vapour deposition technology for the manufacture of combinatorial material libraries

Innovative Ion Beam technology and high precision engineering span togesther for the manufacture of combinatorial material libraries.

Fiche signalétique

  • Département HESB | Technique et informatique
  • Pôle de recherche Technique de production
  • Champ de recherche Technologies appliquées laser, photonique et de surface
  • Durée (prévue) 01.10.2016 - 30.06.2019
  • Direction du projet Thomas Nelis
  • Partenaires - secteur privé Alemnis
  • Partenaires - établissements de recherche, y c. BFH EMPA
  • Mots-clés PE CVD, microwave plasma, Ion Beam ECR

Contexte initial

There is an increasing demand for tools to rapidly synthesis complex new materials (e.g. metallic glasses or high entropy alloys that include many elements) by means of combinatorial thin film libraries. The microstructure of such materials is dependent upon deposition temperature, which is thus also a parameter to be optimized. COMBIMAT extends the number of elements and temperatures that can be screened at once, compared to the competition.


The project goal is to develop, and validate a new type of physical vapour deposition (PVD) system that uses an original multi beam sputtering (MBS) technology to do multicomponent, multilayer and high quality thin films combinatorial libra


The BFH contribution to the project is related to the design of an innovative sample holder, consisting of high precision moveable apertures and a stage with micro-heaters together with software to guide an efficient statistical Design of Experiment (DOE) approach to the material discovery process.


COMBIMAT will commercialise a tool for material discovery via deposition of combinatorial material libraries by combining a physical vapour deposition system with a unique multi-temperature sample holder and a motion programmable mask.